联系人: 熊麟
邮箱: xionglin@shanghaitech.edu.cn
电话: 021-20684658
Gentle Mill 是由匈牙利品牌 Technoorg Linda 生产的一款低能氩离子精修仪，专为透射电子显微镜（TEM）和聚焦离子束（FIB）样品的最终抛光与清洁设计，广泛应用于材料科学、纳米技术、半导体等领域的高分辨率成像与分析。适用于 FIB 样品去污染、机械抛光样品精修、超薄平面（<25 μm）减薄等场景。
仪器参数：
• Ion energy: 100 - 2000 eV, continuously adjustable
• Ion current density: max. 10 mA/cm2
• Beam current: up to 80 µA, continuously adjustable
• Beam diameter: cca. 2 mm
• Electronically optimized working gas flow
• 28 µm/h milling rate on c-Si at 2000 eV ion energy and at 30° angle of beam incidence
SPECIMEN STAGE
• Milling angle: 0° - 40°, electronically adjustable in 0.1° increments
• Computer controlled in-plane specimen rotation and oscillation (from ±10° to ±120°, electronically adjustable in 10° steps)
