JSM-IT500HR场发射高分辨扫描电子显微镜

发布者：朱海音发布时间：2022-04-13浏览次数：578


联系人: 马后逾

电话： 021-20684755

邮箱: mahy2@shanghaitech.edu.cn


主要规格和技术参数:

热场发射灯丝，1-30 KV连续可调，二次电子探测器，背散射电子探测器，低真空二次电子探测器，EDS探测器

1.  Schottky field-emission gun: Maximum Beam Current: 20 nA (30 kV)

2.  Aperture angle control lens (ACL): high-resolution observation even with large probe current

3.Secondary electron detector (E.T. detector)
4.Backscattered electron detector (Semiconductor detector)

4.  Low Vacuum with back scattered electron detector and low vacuum second electron detector for 10~150 Pa

5.  Built-in energy-dispersive X-ray spectrometer (EDS): fast and excellent operability

6.  Resolution: 1.5 nm (30 kV, WD 5 mm), 4.0 nm (1 kV, WD 5 mm)

7.  Three key functions for fast and easy analysis: Zeromag, Live Analysis and SMILE VIEWTM  Lab

8.  Advanced auto function algorithms make operation simple: Auto Focus, Auto Stigma and Auto Beam Alignment

9.  The large specimen chamber: Maximum specimen size 8 inch (203.2 mmФ mountable) ; Maximum load 2 kg

10.Equipped with in-situ stage: SEM PicoIndenter and SEM in-situ stretching stage