联系人: 朱海音 021-20685333 孟庆阳 021-20685476
仪器参数：
GUN: In-lens Schottky Electron Gun
Lens system: Hybrid Lens/HL
GB (Gentle Beam Mode)
Detector: LED, USD, UED, RBED
SEM Resolution: 1.2nm @ 15 kV with GB
3.0nm @ 0.1kV with GB
FIB Resolution: 4.0nm @ 30kV
Image magnification: ×50 to 300,000 (in FIB)
×20 to 1,000,000 (in SEM mode)
Acc. Voltage: SEM mode 0.5 to 30.0 kV
GB mode 0.1 to 29.9 kV
Beam current: 1pA to 300nA (SEM)
1pA to 90nm (Ion Beam)
Sample Transfer System: without exposing to air
Ex-situ Pick-up System
In-situ Oxford manipular
主要应用：TEM 超薄样品制备、微纳加工、截面分析、三维重构
